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熔融石英



Diameter 2" 3" 4" 5" 6" 8"
Thickness (um) 0.1 or more 0.15 or more 0.20 or more 0.30 or more 0.30 or more 0.50 or more
Material Fused Silica
Grade/Brand JGS2/JGS1/JGS3
Surface Finished DSP/SSP
TTV (um) <8 <10 <10 <10 <15 <20
Bow/Warp (um) <30 <30 <40 <40 <60 <60
Top Side Ra (nm) <1
S/D (um) 40/20