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1 Thickness Range Thickness Tolerance Diameter
Thermal Oxide : 500A-150,000A ± 5% 2"-12"
2 Thickness Range Thickness Tolerance Diameter
PECVD/LPCVD Nitride : 100A-5000A ± 5% 2"-12"
3 Thickness Range Thickness Tolerance Diameter
Film Coating : Al
Ti
Co
NiV
NiCr
Cr
Mo
WTi
Ni
Ag
Au
Pt
± 5% 2"-12"